Grade name dust particles maximum allowable number / cubic meter
≥ 0.5um ≥ 5um
100 3500 0
10000 350000 2000
100000 3500000 20000
300000 10500000 60000
Grade name dust particles maximum allowable number / cubic meter
≥ 0.5um ≥ 5um
100 3500 0
10000 350000 2000
100000 3500000 20000
300000 10500000 60000
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